JPH055947Y2 - - Google Patents
Info
- Publication number
- JPH055947Y2 JPH055947Y2 JP12430088U JP12430088U JPH055947Y2 JP H055947 Y2 JPH055947 Y2 JP H055947Y2 JP 12430088 U JP12430088 U JP 12430088U JP 12430088 U JP12430088 U JP 12430088U JP H055947 Y2 JPH055947 Y2 JP H055947Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- workbench
- port
- opening
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 238000005192 partition Methods 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000001143 conditioned effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- -1 alkalis Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 235000019645 odor Nutrition 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12430088U JPH055947Y2 (en]) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12430088U JPH055947Y2 (en]) | 1988-09-22 | 1988-09-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0245141U JPH0245141U (en]) | 1990-03-28 |
| JPH055947Y2 true JPH055947Y2 (en]) | 1993-02-16 |
Family
ID=31373915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12430088U Expired - Lifetime JPH055947Y2 (en]) | 1988-09-22 | 1988-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH055947Y2 (en]) |
-
1988
- 1988-09-22 JP JP12430088U patent/JPH055947Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0245141U (en]) | 1990-03-28 |
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